The radiofrequency (RF) generators manufactured by Basafan are reliable devices for industrial and laboratory deposition, plasma generation, and even dielectric heating and melting. This device is also one of the most important components of semiconductor manufacturing systems, used for producing integrated circuits (ICs) and chips present in modern computers and electronic equipment. The Basafan RF generator along with its impedance matching network constitute a complete RF plasma generation assembly.
The RF generator is designed and built with 27.12 MHz, 13.56 MHz, 2 MHz or other frequency bands according to the customer .
Why 13.56 MHz?
This frequency is one of the most commonly used in the industrial, scientific, and medical (ISM) radio bands. This band allows for high-power activities without causing any disturbance in the surrounding telecommunications systems since it is for general use. Generators with powers ranging from a few miliwatts to several hundred kilowatts are used in this band.
Basafan radiofrequency (RF) generators
With a working frequency of 13.56 MHz and a variable output power, Basafan radiofrequency generators are currently the most advanced generators on the Iranian market. Designing these generators is a combination of radiofrequency electronics, advanced power amplifier protection, closed-loop control, and high safety factors. Simple manufacture and repair procedures and a very high efficiency are some of the unique qualities of this product. Other features include security against generation of electromagnetic interference, continuous operation capability, ease of operation and control, declaring the type of the produced errors, display of transmitted and reflectedpower, 0-5 V input voltage for controlling the output power of the generator (optional), analog output for transmitted and reflectedpower values (optional), the capability of limiting the reflectedpower, and a compressed air cooling system. Basafan produces this equipment in models ranging from 100 W up to 15 kW with semiconductor components and up to 100 kW with amplifiers based on vacuum tubes.
BasaFan RF Generators Models
All RF generator and match box models come with 18 months guarantees
Technical specifications
Power supply | 220 V (200-240 V), 50 Hz (50-60 Hz) |
Output frequency | 13.56 MHz |
Protection | Various types (protection against reflected power, overtemperature, overcurrent, and overvoltage), especially reflected power limiter |
Display | Graphic display with touch screen or digital display |
Remote control | Digital RS485 |
Working temperature | 10-40°C |
Cooling | Air conditioned |
Output impedance | 50Ω(resistive) |
Dimensions (cm) | Depends on device output |
Weight | Depends on device output |
Output connector | N – 7/16 |
Box material | aluminum |
In case you need consultation or you have any questions, you can contact Basafan experts via +98-21-66033430 or This email address is being protected from spambots. You need JavaScript enabled to view it. .
